Detailed Description
316L stainless forearm tubing at 32 mm OD carries two field penalties inside the FOUP load port. First, particulate rub at the rotary union generates iron-family flakes that push defect density above customer 0.05 particles per wafer spec after roughly 90 days continuous dwell. Second, the steel CTE mismatch against the granite base contributes 0.06 mm repeatability drift across the 22 to 28 degree cleanroom swing. This tubing runs an asymmetric 0 / plus minus 45 / 90 / plus minus 45 schedule with a 0.25 mm PEEK-compatible inner liner co-cured in the autoclave, landing CTE 1.1 ppm per degree Celsius and mass 49 percent below the stainless reference at same bending stiffness. All external surfaces are vacuum-ready peel-ply finished, no post-grind particulate. Bore concentricity held plus minus 0.012 mm over 380 mm effective length so the harmonic-drive coupling seats without shim packs. Guangdong Shenyang New Material, Huizhou facility, supplies cleanroom-packaged consignments with particle-count certificate and prepreg lot cross-reference per serial number for export compliance.
Specification
|
Item |
Value |
|---|---|
|
OD options |
28 / 32 / 36 mm |
|
Wall finished |
1.6 to 2.2 mm stepped per envelope |
|
CTE in-plane |
1.1 ppm per C, 20 to 30 C |
|
Bore concentricity |
plus minus 0.012 mm / 380 mm |
|
Inner liner |
0.25 mm PEEK-compatible, co-cured |
|
Surface finish |
Vacuum peel-ply, no loose fiber |
|
Application |
Wafer transfer robot arm, cleanroom linkage |
Certifications
Custom FAQ
Q: Can you supply the tube double-bag vacuum packed for ISO Class 4 direct entry
A: Yes every production piece ships in double nylon barrier bag with nitrogen purge and particle-count card inside the outer carton.
Q: Is the inner liner compatible with standard wafer-tool isopropyl alcohol wipe cycles
A: Liner formulation is qualified to 5000 IPA wipe cycles at 23 C with no measurable mass loss on gravimetric check.
Q: Do you provide roundness scan data at both coupling ends for robot OEM acceptance
A: Roundness trace per ISO 12180 is supplied at both ends on every lot, one extra ring gauge sample included for incoming inspection.
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